发明名称 MIXED LIQUID SUPPLY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a mixed liquid supply device capable of accurately perceiving the remaining amount of abrasive stock solution in an abrasive stock solution tank with a simple structure. SOLUTION: The mixed liquid supply device supplying a machining device with mixed liquid in which liquid and abrasive are mixed includes: a weight measuring device; the abrasive stock solution tank for storing the abrasive stock solution loaded onto the weight measuring device; a dilution tank preparing the mixed liquid by mixing the liquid with the abrasive stock solution in a predetermined concentration; a supply tank storing the mixed liquid supplied to the machining device; an abrasive stock solution supply route for supplying the abrasive stock solution from the abrasive stock solution tank to the dilution tank; a first mixed liquid supply route for supplying the mixed liquid from the dilution tank to the supply tank; a second mixed liquid supply route for supplying the mixed liquid stored in the supply tank to the machining device; a control means to which the weight measuring device is connected; and a remaining amount display means connected to the control means, and displaying the remaining amount of the abrasive stock solution in the abrasive stock solution tank. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011173198(A) 申请公布日期 2011.09.08
申请号 JP20100038311 申请日期 2010.02.24
申请人 DISCO CORP 发明人 MAEJIMA MAKOTO;TAKADA NAOTO;WADA KENTARO
分类号 B24B57/02;B24B37/00;H01L21/304 主分类号 B24B57/02
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