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发明名称
Specimen holder, specimen inspection apparatus, and specimen inspection method
摘要
申请公布号
EP2136203(A3)
申请公布日期
2011.09.07
申请号
EP20090251428
申请日期
2009.05.28
申请人
JEOL LTD.
发明人
NISHIYAMA, HIDETOSHI;KOIZUMI, MITSURU;SUGA, MITSUO
分类号
G01N23/22
主分类号
G01N23/22
代理机构
代理人
主权项
地址
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