发明名称 Liquid ejection head, liquid ejection device, and piezoelectric element
摘要 A liquid ejection head includes a piezoelectric element (300) having a piezoelectric layer (70) and electrodes (80) provided on the piezoelectric layer. The piezoelectric layer is 3 µm or less in thickness. The piezoelectric layer is made of a piezoelectric material containing a perovskite compound including bismuth manganate ferrate and barium titanate. The piezoelectric layer is preferentially oriented with the (110) plane, the position (20) of the X-ray diffraction peak attributed to the (110) plane being 31.80º or more and 32.00° or less.
申请公布号 EP2363900(A2) 申请公布日期 2011.09.07
申请号 EP20110156100 申请日期 2011.02.25
申请人 SEIKO EPSON CORPORATION 发明人 HAMADA, YUSUAKI
分类号 H01L41/187;B41J2/045;B41J2/055;B41J2/135;B41J2/14;H01L21/314;H01L21/316;H01L21/8246;H01L27/105;H01L41/08;H01L41/09;H01L41/18;H01L41/22;H01L41/318;H01L41/39 主分类号 H01L41/187
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