| 摘要 |
PROBLEM TO BE SOLVED: To simplify the structure of an X-Y table, to realize the high speed movement of the table, and to realize accurate position control by preventing any influence of the heating of a driving source. SOLUTION: A two-axial driving system for driving one table is arranged so as to be shaped like L extended along an X axis and a Y axis. The stator parts of the rotary motors of an X axis driving transmitting part and a Y axis driving transmitting part and a pedestal are integrally formed so that the pedestal can be functioned as a heat sink. A feed screw is integrally formed with the shaft of the rotary motor, and a blade having an inclination matched with the lead angle of the feed screw is used as a nut. |
