Positioning device with confocal Fabry-Perot interferometer

摘要

Position acquisition device has position acquisition unit with a confocal Fabry-Perot interferometer (10). The confocal Fabry-Perot interferometer has first and second resonator reflective surfaces; and folding reflective surface arranged in a beam path between first and second resonator reflective surfaces. Folding reflective surface is coupled to an object. Collimator is arranged in the beam path between first and second resonator reflective surfaces. An independent claim is included for a method for acquiring position.