SUBSTRATE SUPPORT STRUCTURE, CLAMP PREPARATION UNIT, AND LITHOGRAPHY SYSTEM.,申请号NL20101038213-传众专利搜索

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发明名称	SUBSTRATE SUPPORT STRUCTURE, CLAMP PREPARATION UNIT, AND LITHOGRAPHY SYSTEM.
摘要
申请公布号	NL1038213(A)	申请公布日期	2011.09.06
申请号	NL20101038213	申请日期	2010.08.31
申请人	MAPPER LITHOGRAPHY IP B.V.,	发明人	JONG, HENDRIK JAN
分类号	G03F7/00;H01L21/683	主分类号	G03F7/00
代理机构		代理人
主权项
地址

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