| 摘要 |
A plurality of pressure generating chambers being formed of a silicon substrate, in which a crystal face orientation of a surface is a (110) plane, and each pressure generating chambers communicating with nozzles in parallel. Piezoelectric elements are formed on one surface of the substrate with a vibration plate interposed therebetween and include a lower electrode film, a piezoelectric layer, and an upper electrode film. In each of the pressure generating chambers, an end surface is formed of a first (111) plane perpendicular to the (110) plane and an end surface in a longitudinal direction is formed of a second (111) plane inclined by a predetermined angle with respect to the first (111) plane.
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