发明名称 Semiconductor device having a circular-arc profile on a silicon surface
摘要 A semiconductor device includes a shallow isolation trench (STI) structure on a silicon substrate for isolating element-forming regions from one another. The surface region of the silicon substrate in the element-forming regions, as viewed in the extending direction of the gate electrode lines, once falls and thereafter rises monotonically from the periphery toward the center of the element-forming regions.
申请公布号 US8013415(B2) 申请公布日期 2011.09.06
申请号 US20070790996 申请日期 2007.04.30
申请人 ELPIDA MEMORY, INC. 发明人 OHUCHI MASAHIKO
分类号 H01L21/70 主分类号 H01L21/70
代理机构 代理人
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