发明名称 Methods, systems, and computer program products for product randomization and analysis in a manufacturing environment
摘要 Methods, systems, and computer program products for implementing product randomization and analysis in a manufacturing environment are provided. A method includes processing products for a plurality of lots, at process equipment, using a randomization technique for selecting each product in the lots. The method further including generating an operation identification record for each operation in the process recipe that includes mapping, for each operation, a slot identifier associated with a randomly selected product to a process variable identifier, a process tool, and the operation. The method also includes defining slot groupings using slot identifiers for a product carrier and identifying product yield patterns by analyzing historical yields for each of the slot groupings. The method also includes determining the frequency of occurrence of one or more product yield patterns for each operation in the process recipe by analyzing product yields from the operation identification records corresponding to the plurality of lots.
申请公布号 US8015040(B2) 申请公布日期 2011.09.06
申请号 US20070668731 申请日期 2007.01.30
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CIANFRANI SUSAN M.;LONG CHRISTOPHER W.;RAWLINS BRAD J.;RICE JAMES;SONG YUNSHENG
分类号 G06F17/30 主分类号 G06F17/30
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