METHOD OF MANUFACTURING PIEZOELECTRIC CERAMICS FILM, PIEZOELECTRIC ELEMENT, LIQUID SPRAY HEAD, LIQUID SPRAY DEVICE, AND COMPOSITION FOR PIEZOELECTRIC CERAMICS FILM FORMATION

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric ceramics film capable of crystallization at low temperature, a piezoelectric element, a liquid spray head, and a liquid spray device, and a composition for piezoelectric ceramics film formation.

SOLUTION: The method includes a step of forming a piezoelectric ceramics precursor film with a composition for piezoelectric ceramics film formation containing a complex having three or more pieces of Pb in one molecule and a molecular weight of≥1,500 or more and a solvent, and a step of heating the piezoelectric ceramics precursor film to crystallize it.

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