发明名称 Particle Beam Transport Apparatus And Method Of Transporting A Particle Beam With Small Beam Spot Size
摘要 An apparatus for transporting a charged particle beam is provided. The apparatus may include: means for scanning the charged particle beam on a target, a dipole magnet arranged upstream of the means for scanning, at least three quadrupole lenses arranged between the dipole magnet and the means for scanning, and means for adjusting the field strength of at least three quadrupole lenses in function of the scanning angle of the charged particle beam. The apparatus can be made at least single achromatic.
申请公布号 US2011210263(A1) 申请公布日期 2011.09.01
申请号 US20080680158 申请日期 2008.09.26
申请人 ABS MICHEL;ZAREMBA SZYMON;KLEEVEN WILLEM 发明人 ABS MICHEL;ZAREMBA SZYMON;KLEEVEN WILLEM
分类号 G21K1/093 主分类号 G21K1/093
代理机构 代理人
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