摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a high-quality functional film with high productivity. <P>SOLUTION: The manufacturing method includes delivering a long support 12 provided with the first laminate film on the back surface by an organic film forming device 22 and having a self-supporting property, forming an organic film on the front surface of the support 12 while carrying the support, providing the second laminate film 82 onto the surface of the organic film, winding the support 12 in the form of a film roll 42, loading the film roll 42 into a vacuum film forming device 24, delivering the support 12 rolled with the first laminate film and the second laminate film 82 continuously from the film roll 42, peeling the second laminate film 82 while carrying the support 12, forming an inorganic film on the organic film of the support 12 and winding the support 12 in the form of a film roll 48. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |