| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing spatial light modulator, which is capable of solving the following problem: a spatial light modulator has difficulty in improving productivity due to a large number of man-hours for assembly because a piezoelectric element, an elastic member, and a micro mirror are individually manufactured from mutually different materials. <P>SOLUTION: The method for manufacturing the spatial light modulator includes: a coupling step for coupling one end of an electromechanical conversion part expanded and contracted by an electric signal to a driving-side substrate; a formation step for forming a deformable stress relief part on a rear face of a surface for supporting a reflection portion which reflects optical in a driven-side substrate for supporting the reflection portion; and an integration step for integrating the driving-side substrate and the driven-side substrate by coupling the other end of the electromechanical conversion part to the stress relief part. In the coupling step, the plurality of electromechanical conversion parts are coupled to the driving-side substrate. In the formation step, the plurality of stress relief parts are formed on the driven-side substrate. Moreover, in the integration step, the plurality of electromechanical conversion parts and stress relief parts may be integrally coupled. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
