发明名称 Graphene electronic device and method of fabricating the same
摘要 A graphene electronic device may include a silicon substrate, connecting lines on the silicon substrate, a first electrode and a second electrode on the silicon substrate, and an interlayer dielectric on the silicon substrate. The interlayer dielectric may be configured to cover the connecting lines and the first and second electrodes and the interlayer dielectric may be further configured to expose at least a portion of the first and second electrodes. The graphene electronic device may further include an insulating layer on the interlayer dielectric and a graphene layer on the insulating layer, the graphene layer having a first end and a second end. The first end of the graphene layer may be connected to the first electrode and the second end of the graphene layer may be connected to the second electrode.
申请公布号 US2011210314(A1) 申请公布日期 2011.09.01
申请号 US20110929817 申请日期 2011.02.17
申请人 SAMSUNG ELECTRONICS CO., LTD.;SNU R&DB FOUNDATION 发明人 CHUNG HYUN-JONG;BAEK SEUNG-JAE;SEO SUN-AE;WOO YUN-SUNG;HEO JIN-SEONG;SEO DAVID
分类号 H01L29/66;H01L21/335 主分类号 H01L29/66
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