发明名称 ALUMINA SINTERED BODY, METHOD FOR PRODUCING THE SAME AND SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER
摘要 <P>PROBLEM TO BE SOLVED: To sinter a molded body produced with general alumina powder at low temperature. <P>SOLUTION: The method for producing the alumina sintered body comprises: a step (a) molding a powdery mixture of Al<SB>2</SB>O<SB>3</SB>and MgF<SB>2</SB>or a powdery mixture of Al<SB>2</SB>O<SB>3</SB>, MgF<SB>2</SB>and MgO into a molded body with a prescribed shape; a step (b) of performing hot press-firing of the molded body in a vacuum atmosphere or a nonoxidizing atmosphere to obtain an alumina sintered body, wherein, when the amount of use of MgF<SB>2</SB>to 100 pts.wt. of Al<SB>2</SB>O<SB>3</SB>is X (pts.wt.) and hot press firing temperature is defined as Y(&deg;C), the hot press firing temperature is set to satisfy the following equations (1) to (4): 1120&le;Y&le;1300 (1), 0.15&le;X&le;1.89 (2), Y&le;-78.7X+1349 (3), and Y&ge;-200X+1212 (4). <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011168472(A) 申请公布日期 2011.09.01
申请号 JP20100056466 申请日期 2010.03.12
申请人 NGK INSULATORS LTD 发明人 TERATANI NAOMI;HAYASE TORU;KATSUTA YUJI;KIDA MASAHIRO
分类号 C04B35/111;C04B35/645;C04B41/88;H01B3/12;H01L21/683 主分类号 C04B35/111
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