发明名称 POLYMER CONTAINING AN AROMATIC RING FOR A RESIST UNDERLAYER, AND RESIST UNDERLAYER COMPOUND INCLUDING THE POLYMER
摘要 Provided is a polymer containing an aromatic ring for a resist underlayer, and a resist underlayer compound including the polymer. The polymer containing an aromatic ring comprises a unit structure as expressed in chemical formula 1.
申请公布号 WO2011081285(A3) 申请公布日期 2011.09.01
申请号 WO2010KR06948 申请日期 2010.10.11
申请人 CHEIL INDUSTRIES INC.;KIM, MIN-SOO;CHEON, HWAN-SUNG;CHO, SUNG-WOOK;OH, SEUNG-BAE;SONG, JEE-YUN 发明人 KIM, MIN-SOO;CHEON, HWAN-SUNG;CHO, SUNG-WOOK;OH, SEUNG-BAE;SONG, JEE-YUN
分类号 G03F7/11 主分类号 G03F7/11
代理机构 代理人
主权项
地址