| 发明名称 |
CVD-SIEMENS REACTOR PROCESS HYDROGEN RECYCLE SYSTEM |
| 摘要 |
<p>A hydrogen recycle process and system for use with chemical vapor deposition (CVD) Siemens type processes is provided. The process results in substantially complete or complete hydrogen utilization and substantially contamination-free or contamination-free hydrogen.</p> |
| 申请公布号 |
KR20110097732(A) |
申请公布日期 |
2011.08.31 |
| 申请号 |
KR20110017238 |
申请日期 |
2011.02.25 |
| 申请人 |
REVANKAR VITHAL;LAHOTI SANJEEV |
发明人 |
REVANKAR VITHAL;LAHOTI SANJEEV |
| 分类号 |
C23C16/44;H01L21/205 |
主分类号 |
C23C16/44 |
| 代理机构 |
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代理人 |
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