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发明名称
APPARATUS FOR PLATE SUBSTRATE
摘要
申请公布号
KR20110097225(A)
申请公布日期
2011.08.31
申请号
KR20100016957
申请日期
2010.02.25
申请人
K.C.TECH CO., LTD.
发明人
HWANG, SUNG MUN
分类号
H01L21/208
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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