发明名称 Technique and apparatus for depositing layers of semiconductors for solar cell and module fabrication
摘要 The present invention advantageously provides for, in different embodiments, low-cost deposition techniques to form high-quality, dense, well-adhering Group IBIIIAVIA compound thin films with macro-scale as well as micro-scale compositional uniformities. It also provides methods to monolithically integrate solar cells made on such compound thin films to form modules. In one embodiment, there is provided a method of growing a Group IBIIIAVIA semiconductor layer on a base, and includes the steps of depositing on the base a nucleation and/or a seed layer and electroplating over the nucleation and/or the seed layer a precursor film comprising a Group IB material and at least one Group IIIA material, and reacting the electroplated precursor film with a Group VIA material. Other embodiments are also described.
申请公布号 US8008113(B2) 申请公布日期 2011.08.30
申请号 US20100816236 申请日期 2010.06.15
申请人 SOLOPOWER, INC. 发明人 BASOL BULENT M.
分类号 H01L21/00;H01L21/06 主分类号 H01L21/00
代理机构 代理人
主权项
地址