发明名称 APPARATUS FOR MANUFACTURING THIN-FILM LAMINATED BODY
摘要 <p>Disclosed is an apparatus for manufacturing a thin-film laminated body in which fold creases, heating creases and tension creases of the film are reduced by means of crease stretching, and the quality of the thin-film laminated body is improved. The apparatus for manufacturing a thin-film laminated body is an apparatus in which a thin-film laminated body is manufactured by positioning a strip-shaped flexible substrate in such a way that the width direction of the strip-shaped flexible substrate is in the vertical direction, feeding the strip-shaped flexible substrate in the horizontal direction, feeding the strip-shaped flexible substrate to a film-forming section provided at a point along the feed path of the strip-shaped flexible substrate, and laminating a thin film onto the surface of the strip-shaped flexible substrate by means of a film-forming device provided in the film-forming section. A temperature-raising section (20), which has a roll heater (21) in front of at least the foremost film-forming section (30), is provided in the apparatus for manufacturing a thin-film laminated body, and the apparatus is set in such a way that the temperature of the strip-shaped flexible substrate (1) is heated by the roll heater (21) to around the temperature of the film-forming section (30).</p>
申请公布号 WO2011077901(A9) 申请公布日期 2011.08.25
申请号 WO2010JP71221 申请日期 2010.11.29
申请人 FUJI ELECTRIC HOLDINGS CO., LTD.;YOSHIDA, TAKASHI;YOKOYAMA, SHOJI;YAMADA, TAKANORI;NISHIZAWA, MASANORI;WADA, TAKENORI 发明人 YOSHIDA, TAKASHI;YOKOYAMA, SHOJI;YAMADA, TAKANORI;NISHIZAWA, MASANORI;WADA, TAKENORI
分类号 H01L31/04 主分类号 H01L31/04
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