| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact charged particle beam device capable of maintaining high vacuum even during emission of electron beams. SOLUTION: A non-evaporation getter pump is arranged at an upstream of an electron optical differential exhaust of the charged particle beam device, the minimum essential ion pump 118 is arranged downstream, and both are used in common. Furthermore, a removable coil is mounted on an electron gun part. With this, the compact charged particle beam device can be obtained capable of maintaining a vacuum degree in a column in high vacuum at a 10<SP>-8</SP>Pa scale such as, for example, a compact scanning electron microscope and the charged particle beam device having a plurality of columns. Furthermore, a compact SEM column to monitor a position of a probe of a prober device to directly measure electrical characteristics of a semiconductor can be easily built in. In addition, downsizing of an electron beam irradiation column of a mirror projection type electron beam inspection device for semiconductor element inspection becomes possible. COPYRIGHT: (C)2011,JPO&INPIT
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