GRINDING METHOD, MANUFACTURING METHOD OF ELECTRONIC DEVICE, AND GRINDING DEVICE

摘要

PROBLEM TO BE SOLVED: To suppress clogging of a grindstone or an abrasive paper in a grinding method, a manufacturing method of an electronic device and a grinding device. SOLUTION: The grinding method comprises a step of forming a resin layer 23 on a base material 21, and a step of grinding the resin layer 23 by a grindstone or an abrasive paper under radiation of ultraviolet light 11 on the resin layer 23 or after the radiation of ultraviolet light 11 on the resin layer 23. COPYRIGHT: (C)2011,JPO&INPIT