| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an auxiliary plate for a polishing pad of a new structure capable of easily attaching/detaching the polishing pad to/from a rotating surface plate, while securing fixing force of the polishing pad in relation to the rotating surface plate, and capable of preventing damage of the polishing pad when removing the polishing pad from the rotating surface plate, in particular. <P>SOLUTION: This auxiliary plate includes an auxiliary plate body 14 mounted on an upper surface of the rotating surface plate 12, a pad supporting surface 14a provided at a center part of an upper surface of the auxiliary plate body 14, and a fitting peripheral wall part 18 formed at an outer peripheral edge part of the auxiliary plate body 14 to be fitted to an outer periphery of the rotating surface plate 12. <P>COPYRIGHT: (C)2011,JPO&INPIT |
