| 摘要 |
PROBLEM TO BE SOLVED: To provide an industrially advantageous method for producing diborane which solves the problem that since diborane obtained by conventional methods and used in semiconductor production contains methyl chloride (CH<SB>3</SB>Cl) and methane (CH<SB>4</SB>) as impurities, purity and yield cannot be enhanced satisfactorily, and which gives high purity diborane in a good yield without generating methane as impurity and can enhance yield of a recyclable solvent. SOLUTION: Disclosed is the method for producing diborane in which sodium borohydride is allowed to react with diborane and then further to react with boron trichloride. COPYRIGHT: (C)2011,JPO&INPIT
|
