发明名称
摘要 A method of initiating molecular bonding, comprising bringing one face of a first wafer to face one face of a second wafer and initiating a point of contact between the two facing faces. The point of contact is initiated by application to one of the two wafers, for example, using a bearing element of a tool, of a mechanical pressure in the range from 0.1 MPa to 33.3 MPa.
申请公布号 JP2011524084(A) 申请公布日期 2011.08.25
申请号 JP20110511038 申请日期 2009.08.06
申请人 发明人
分类号 H01L21/02;H01L27/00;H01L27/12;H01L27/146 主分类号 H01L21/02
代理机构 代理人
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