发明名称 PHOTOVOLATIC POWER DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>To obtain a photovoltaic power device that can improve the photoelectric conversion efficiency more than that of conventional techniques without degrading the efficiency of extracting a photocurrent to an external circuit. A photovoltaic power device includes a P-type silicon substrate 101, a low-resistance N-type diffusion layer 102L diffused with an N-type impurity in a first concentration formed at a light-incidence surface side, grid electrodes 111 formed on the low-resistance N-type diffusion layer 102L, a P+ layer 110 formed on a back surface, and a back surface electrode formed on the P+ layer 110. The photovoltaic power device has concave portions 106 provided at a predetermined interval to reach the silicon substrate 101 from an upper surface of the low-resistance N-type diffusion layer 102L, and an upper surface of a region between adjacent concave portions 106 includes the low-resistance N-type diffusion layer 102L. A high-resistance N-type diffusion layer 102H diffused with an N-type impurity in a second concentration, which is lower than the first concentration, is formed in a range of a predetermined depth from a formation surface of the concave portions 106.</p>
申请公布号 EP2259337(A4) 申请公布日期 2011.08.24
申请号 EP20080739040 申请日期 2008.03.27
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 ISHIHARA, TAKASHI;NISHIMURA, KUNIHIKO
分类号 H01L21/268;H01L31/0236;H01L31/0368;H01L31/068;H01L31/18 主分类号 H01L21/268
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