发明名称 |
RETARGET PROCESS MODELING METHOD, AND METHOD FOR FABRICATING MASK USING THE SAME MODELING METHOD |
摘要 |
PURPOSE: A retarget process modeling method, and a method for fabricating mask using the same modeling method are provided to generate improved process model reflecting real PR flow rate by performing a retarget process modeling in consideration of the density of an SRAF pattern interfering PR flow rate. CONSTITUTION: In a retarget process modeling method, and a method for fabricating mask using the same modeling method, a predication data of a desk layout using a conventional process model(S110). Corresponding features which is interfered by PR flow are secured by using bias data(S120). A kernel including a PR flow kernel considering an SRAF(Sub Resolution Assist Feature) is generated(S130). An improved process model is obtained by applying an un-calibrated model to measured data and fitting(S140). |
申请公布号 |
KR20110094467(A) |
申请公布日期 |
2011.08.24 |
申请号 |
KR20100013857 |
申请日期 |
2010.02.16 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, YOUNG MI;KIM, YOUNG CHANG;SUH SUNG SOO |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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