发明名称 |
Method of manufacturing light emitting device |
摘要 |
There are provided a vapor deposition system, a method of manufacturing a light emitting device, and a light emitting device. A vapor deposition system according to an aspect of the invention may include: a first chamber having a first susceptor and at least one gas distributor discharging a gas in a direction parallel to a substrate disposed on the first susceptor; and a second chamber having a second susceptor and at least one second gas distributor arranged above the second susceptor to discharge a gas downwards. When a vapor deposition system according to an aspect of the invention is used, a semiconductor layer being thereby grown has excellent crystalline quality, thereby improving the performance of a light emitting device. Furthermore, while the operational capability and productivity of the vapor deposition system are improved, deterioration in an apparatus can be prevented.
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申请公布号 |
EP2360297(A2) |
申请公布日期 |
2011.08.24 |
申请号 |
EP20100189828 |
申请日期 |
2010.11.03 |
申请人 |
SAMSUNG LED CO., LTD. |
发明人 |
LEE, DONG JU;SHIM, HYUN WOOK;LEE, HEON HO;KIM, YOUNG SUN;KIM, SUNG TAE |
分类号 |
C30B25/14;C23C16/455;C23C16/54;C30B29/40 |
主分类号 |
C30B25/14 |
代理机构 |
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主权项 |
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地址 |
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