摘要 |
<p>This invention relates to method of utilising a waste slurry from silicon wafer production. More specific, this invention relates to a method for utilising the solid fraction of the slurry, which stems from the sawing or slicing of silicon wafers as a raw material in other industrial processes such as production of certain ceramics, such as silicon nitride bonded silicon carbide and/or silicon bonded silicon carbide.</p> |