| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate mounted with a thin film transistor, composed of a plastic substrate mounted with a thin film transistor, in which stabilization and high quality of an oxide thin film used as an active layer are achieved. SOLUTION: The method includes at least a step of forming an amorphous oxide thin film 13 as an active layer on or above a plastic substrate 10 and a step of subjecting the amorphous oxide thin film 13 to electromagnetic induction heating. The electromagnetic induction heating step is characterized in that a temperature equal to or higher than the glass transition temperature of the plastic substrate 10 is not applied to the plastic substrate 10 for a given time, and the resistivity of the amorphous oxide thin film 13 is increased and stabilized while keeping the amorphous phase. COPYRIGHT: (C)2011,JPO&INPIT |
