NANO PIEZOELECTRIC ACTUATOR ENERGY CONVERSION APPARATUS AND METHOD OF MAKING SAME
摘要
A nano piezoelectric actuator energy conversion apparatus fabricated from silicon comprising a mechanical amplifier comprising a fixed supporting member, a movable supporting member connected to compliant links attached to at least one actuating arm, and a piezoelectric stack affixed between the fixed supporting member and movable supporting member. Also disclosed is a method for fabricating a nano piezoelectric actuator from silicon and preloading the nano actuator with a piezoelectric stack.
申请公布号
WO2011041689(A3)
申请公布日期
2011.08.18
申请号
WO2010US51142
申请日期
2010.10.01
申请人
VIKING AT, LLC;PARKER HANNIFIN CORPORATION;MOLER, JEFFERY, B.;MELZAK, JEFFREY, M.