发明名称 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE HAVING VERTICAL-TYPE CHANNEL
摘要 A semiconductor device includes an active region including a surface region and a first recess formed below the surface region, the active region extending along a first direction; a device isolation structure provided on an edge of the active region; a gate line traversing over the surface region of the active region along a second direction orthogonal to the first direction; a second recess formed in the device isolation structure to receive a given portion of the gate line into the second recess; a first junction region formed in the active region beneath the first recess and on a first side of the gate line; and a second junction region formed on a second side of the gate line and above the first junction region. The first and second junction regions define a vertical-type channel that extends along lateral and vertical directions.
申请公布号 US2011198688(A1) 申请公布日期 2011.08.18
申请号 US201113085283 申请日期 2011.04.12
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK JUNG-WOO
分类号 H01L29/78 主分类号 H01L29/78
代理机构 代理人
主权项
地址