| 发明名称 |
LITHOGRAPHIC APPARATUS, REMOVABLE MEMBER AND DEVICE MANUFACTURING METHOD |
| 摘要 |
A sealing member is provided to prevent immersion liquid ingress to a gap between components. The sealing member has a plastic or polymer sealing portion that is adhered to the components forming the gap being sealed. The sealing member is constructed so as to reduce the force-coupling, in particular the time-related force-coupling, between the components being sealed.
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| 申请公布号 |
US2011199592(A1) |
申请公布日期 |
2011.08.18 |
| 申请号 |
US20100946618 |
申请日期 |
2010.11.15 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
DE GRAFF ROELOF FREDERIK;VAN DE KERKHOF MARCUS ADRIANUS;LEENDERS MARTINUS HENDRIKUS ANTONIUS;LIEBREGTS PAULUS MARTINUS MARIA;DE ROOIJ GERARDUS MARTINUS ANTONIUS;HOUBEN MARTIJN;DZIOMKINA NINA VLADIMIROVNA;SONDAG-HUETHORST JOHANNA ANTOINETTE MARIA;DE KRUIJF NIEK ELOUT;BADAM VIJAY KUMAR |
| 分类号 |
G03B27/52;C09J7/00;F16J15/02 |
主分类号 |
G03B27/52 |
| 代理机构 |
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