发明名称 SISTEMA E METODO PER ESEGUIRE IL TEST ELETTRICO DI VIE PASSANTI NEL SILICIO (TSV - THROUGH SILICON VIAS)
摘要 An embodiment of a testing system for carrying out electrical testing of at least one first through via extending, at least in part, through a substrate of a first body of semiconductor material. The testing system has a first electrical test circuit integrated in the first body and electrically coupled to the first through via and to electrical-connection elements carried by the first body for electrical connection towards the outside; the first electrical test circuit enables detection of at least one electrical parameter of the first through via through the electrical-connection elements.
申请公布号 ITTO20100109(A1) 申请公布日期 2011.08.17
申请号 IT2010TO00109 申请日期 2010.02.16
申请人 STMICROELECTRONICS S.R.L. 发明人 PAGANI ALBERTO
分类号 主分类号
代理机构 代理人
主权项
地址