MAGNETRON SPUTTERING APPARATUS,申请号EP20060811440-传众专利搜索

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发明名称	MAGNETRON SPUTTERING APPARATUS
摘要
申请公布号	EP1953257(B1)	申请公布日期	2011.08.17
申请号	EP20060811440	申请日期	2006.10.06
申请人	TOHOKU UNIVERSITY;TOKYO ELECTRON LTD.	发明人	OHMI TADAHIRO;GOTO TETSUYA;MATSUOKA TAKAAKI
分类号	C23C14/35	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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