| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grooving tool that prevents irregular peeling by a friction resistance from occurring easily, has a low load, and scrapes off a thin film smoothly, and to provide a grooving method using the grooving tool. <P>SOLUTION: The grooving tool 8 is formed so that a plurality of recesses 82 and projections 83 are aligned alternately at a lower end of a blade body 81. The height of the projections is set so that projections before and after the projection positioned at the center are positioned at an upper part gradually, and left/right side faces 86, 87 of the projections are formed in parallel. <P>COPYRIGHT: (C)2011,JPO&INPIT |
