DRYING METHOD OF FLUORINATED HYDROCARBON SOLVENT

摘要

PROBLEM TO BE SOLVED: To provide a drying method which minimizes loss of a fluorinated hydrocarbon adhered to substances to be washed scattered out of an apparatus over a short period of time. SOLUTION: In a washing apparatus using a fluorinated hydrocarbon solvent, the drying method of the fluorinated hydrocarbon solvent adhered to the substances to be washed is characterized by making the fluorinated hydrocarbon solvent adhered to the substances to be washed evaporate by jetting the superheated vapor of the fluorinated hydrocarbon with a boiling point in a range of 50-150°C to the substances to be washed. COPYRIGHT: (C)2011,JPO&INPIT