| 摘要 |
Disclosed is a substrate holder, which can stably hold a substrate in a correct attitude, without being affected by the rear surface state and warping of the substrate, even if the position of the substrate on the placing surface of a transfer body is shifted a little. In the substrate holder (50), at the time of holding the peripheral portion of the semiconductor wafer (W), some of the lawn grass-like protruding sections (54) on a pad main body (52) are hidden under the semiconductor wafer (W), and the rest of the protruding sections are exposed outside of the semiconductor wafer (W). Then, the protruding sections (54) hidden under the semiconductor wafer (W) sink the semiconductor wafer (W) to an appropriate depth with a gravity force by being in contact with the rear surface (WB) of the semiconductor wafer (W), and hold the semiconductor wafer (W) mainly in the longitudinal direction. Furthermore, some of the protruding sections (54) exposed near the peripheral portion of the semiconductor wafer (W) hold the semiconductor wafer (W) mainly in the horizontal direction by being in contact with the side surface (WS) of the semiconductor wafer (W). |
