| 摘要 |
<P>PROBLEM TO BE SOLVED: To simplify an etching process, and to reduce a variation of optical characteristics of an obtained wire grid polarizer as one of objectives, in a method of manufacturing the wire grid polarizer including the etching process in which a metallic wire is formed by etching a metallic layer formed on a substrate having grating projections. <P>SOLUTION: In a roll-to-roll type manufacturing method of a wire grid polarizer, during a period when a base film which has grating projections on the surface and has a metallic layer formed on the grating projections is transported from a web roll wound in a roll form to a take-up roll via a transportation roll, the base film is brought into contact with an etching liquid, and a part of the metallic layer is etched, and then optical characteristics of the base material film are measured. On the basis of the measurement of the optical characteristics of the base film, the line speed of the roll-to-roll type system is controlled, and thereby a period when the base film is brought into contact with the etching liquid is controlled. <P>COPYRIGHT: (C)2011,JPO&INPIT |
