STRATIFIED STRUCTURE WITH FERROELECTRIC LAYER AND PROCESS FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a layer structure including a substrate, a platinum layer, and a ferroelectric layer which has enhanced adhesiveness between the platinum layer and the substrate. SOLUTION: The layer structure includes a substrate S, a platinum layer PS, and a ferroelectric layer FS formed on the platinum layer PS; a surface OS of the substrate S contains silicon dioxide; and an intermediate layer ZS, formed of amorphous aluminum oxide, is provided between the substrate S and the platinum layer PS. The intermediate layer ZS enhances the morphology of the ferroelectric layer FS and ensures uniformity of the layer structure. COPYRIGHT: (C)2011,JPO&INPIT