| 摘要 |
The present invention relates to a photo mask manufacturing device and method for automatically attaching a photo mask film to a glass substrate, and more specifically, to a photo mask manufacturing device and method for automatically attaching a photo mask film to a glass substrate, wherein the glass substrate is rotated 180 degrees while the glass substrate is mounted on the upper part of a vacuum panel so that the rotated glass substrate may be positioned in the lower part of the vacuum panel, and the vacuum panel is moved in the horizontal direction in order to attach an adhesive and the photo mask film. |
