Method for making nanowires and apparatus containing them

摘要

A method for producing nanowires comprising:
a) depositing a masking material over a substrate comprising silicon;
b) removing the masking material using a first process that removes the masking material in preference to silicon;
c) removing silicon using a second process that removes silicon in preference to the masking material;
d) continuously repeating the sequence of steps a), b) and c) to control the creation of nanowires; and
e) stopping repetition of the sequence of steps a), b) and c).
An apparatus containing these nanowires is also disclosed.