| 摘要 |
PURPOSE: A waterfront aberration retrieval method through three-dimensional beam measurement is provided to calculate the pupil function of an optical system. CONSTITUTION: A waterfront aberration retrieval method through three-dimensional beam measurement is as follows. Light emitted from an optical system(2) is focused on the optical system. The pupil function of the amplitude and phase of light waves is calculated at an imaging position where the light is focused on using an Extended Nijboer-Zernike method. A waterfront aberration is recovered from the calculated pupil function to analyze the properties of the optical system.
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