| 摘要 |
<p>A laser process unit mainly comprises a pulse oscillating type solid laser unit whose exciting source is a laser diode that emits light in a principal energy absorbing spectrum of a solid laser activated media, and characterized by comprising a measuring instrument that measures radiated laser light output on a full-time basis, a maximum value judge means that obtains the maximum value of the laser light output value measured during a specific monitor period while laser light is radiated, an error judge means that compares the maximum value with a specific laser output value as a monitor level after an elapsed time of the predetermined specific monitor period and judges whether the maximum value is within a specific range or not and a trouble shooting means that displays an alarm content and simultaneously halts an operation of at least the pulse oscillating type solid laser unit when the error judge means judges the maximum value out of the specific range.</p> |
