STRUCTURES AND METHODS FOR LOW-K OR ULTRA LOW-K INTERLAYER DIELECTRIC PATTERN TRANSFER,申请号EP20070794523-传众专利搜索

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发明名称	STRUCTURES AND METHODS FOR LOW-K OR ULTRA LOW-K INTERLAYER DIELECTRIC PATTERN TRANSFER
摘要
申请公布号	EP2024993(A4)	申请公布日期	2011.08.10
申请号	EP20070794523	申请日期	2007.05.03
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	BUCCHIGNANO, JAMES, J.;GIBSON, GERALD, W.;ROTHWELL, MARY, B.;YU, ROY, R.
分类号	H01L21/768;H01L21/311	主分类号	H01L21/768
代理机构		代理人
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地址

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