METHOD OF PRODUCING NANO-SIZED STRUCTURES

摘要

FIELD: physics. ^ SUBSTANCE: proposed method comprises displacing nano-sized substance in space by electron beam its lateral side being brought toward said substance to not over 10 nm. Then, electron beam is moved along preset trajectory that defines the shape of nano-structure. Focusing electron beam of scanned electron microscope is used for moving nano-dispersed substance. ^ EFFECT: displacement of initial nano-dispersed substance in space with constant control and correction. ^ 2 cl, 7 dwg