发明名称 |
Debris minimization and improved spatial resolution in pulsed laser ablation of materials |
摘要 |
A method and an apparatus of minimizing the deposition of debris onto a sample being ablated. The method comprising the steps of: 1) reducing a laser pulse energy to approximately a threshold level for ablation; and 2) ablating a region of the sample using a multitude of laser pulses, each pulse being sufficiently separated in time to reduce a concentration of ablation products in a gas phase. An apparatus for ablating a region of a sample with a laser beam. The apparatus comprises: 1) a source providing a pulsed laser beam of a certain energy, the source focusing the laser beam on the sample to ablate a region of the sample; and 2) a device for providing a flowing fluid over the region being ablated to remove the ablation products.
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申请公布号 |
US7994450(B2) |
申请公布日期 |
2011.08.09 |
申请号 |
US20020041328 |
申请日期 |
2002.01.07 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
HAIGHT RICHARD A.;LONGO PETER P.;WAGNER ALFRED |
分类号 |
B23K26/00;B23K26/06;B23K26/073;B23K26/14;B23K26/16;B23K26/40;G03F1/00 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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