PRECISION POSITIONING SPUTTERING APPARATUS AND POSITIONING METHOD THEREOF

摘要

A precision positioning sputtering apparatus including a positioning fixture. The positioning fixture has a central hole matching with the positioning axis core of a sputtering rotary plate, and is coaxially mounted on a connecting ring. The connecting ring and the positioning fixture are moved to wear the central hole of the positioning fixture onto the axis core of the sputtering rotary plate. The connecting ring is fixed on the cover board for the mainbody of the precision positioning sputtering apparatus, so as to achieve the positioning of a cathode in which a target material is provided and the disc to be sputtered on sputtering rotary plate. Also disclosed is a precise and quick positioning method.