METHOD OF MANUFACTURING DISPLAY DEVICE, AND DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a display device that hardly causes peeling of a drain electrode and a source electrode even when the drain electrode and source electrode using copper are exposed on a substrate when performing hydrogen termination processing of a semiconductor layer. SOLUTION: The method of manufacturing the display device having the substrate arranged with a plurality of thin film transistors includes: an electrode forming step of forming the source electrode and drain electrode including a single layer or a plurality of conductive layers on a part of the semiconductor layer of the thin film transistor; and a hydrogen termination step of applying the hydrogen termination processing to the semiconductor layer with the source electrode and drain electrode exposed on the substrate. The electrode forming process includes a step of sticking copper on the substrate by introducing inert gas containing neon. COPYRIGHT: (C)2011,JPO&INPIT