| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processing apparatus that is improved in production efficiency by shortening a stop time of the apparatus. SOLUTION: The vacuum processing apparatus includes a transfer container for transferring a wafer to be processed in the internal space, a vacuum container coupled to the sidewall of the transfer container and including a processing chamber having a sample stage therein on which the wafer is mounted, a lid member opened or closed by rotation above the vacuum container, an inner chamber member arranged in the vacuum container and making up the inner wall of the processing chamber, and a jig coupled to the sidewall of the vacuum container to lift and hold the inner chamber member by being coupled thereto. The jig includes a first joint portion having vertical and horizontal shafts, a length-extensible arm portion rotatable around each shaft of the first joint portion, and a second joint portion in which the coupled inner chamber member can rotate around the horizontal axis thereof while arranged at a tip portion of the arm portion. COPYRIGHT: (C)2011,JPO&INPIT |
